Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano, Yukiteru Matsui +3 more | 2005-08-30 |
| 6924227 | Slurry for chemical mechanical polishing and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano, Nobuyuki Kurashima, Nobuo Kawahashi, Masayuki Hattori | 2005-08-02 |