Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Kazuo Nishimoto, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano +3 more | 2005-08-30 |
| 6875088 | Polishing member and method of manufacturing semiconductor device | Hiroyuki Yano | 2005-04-05 |
| 6858539 | Post-CMP treating liquid and method for manufacturing semiconductor device | Gaku Minamihaba, Nobuyuki Kurashima, Hiroyuki Yano | 2005-02-22 |