Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Kazuo Nishimoto, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano +3 more | 2005-08-30 |
| 6897143 | Method of manufacturing semiconductor device including two-step polishing operation for cap metal | Hiroshi Toyoda, Hiroyuki Yano, Gaku Minamihaba, Tetsuo Matsuda, Hisashi Kaneko | 2005-05-24 |
| 6858936 | Semiconductor device having an improved construction in the interlayer insulating film | Gaku Minamihaba, Yoshikuni Tateyama, Hiroyuki Yano | 2005-02-22 |