Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965808 | System and method for optimizing metrology sampling in APC applications | Edward W. Conrad, John S. Smyth, Daniel Sullivan | 2005-11-15 |
| 6922600 | System and method for optimizing manufacturing processes using real time partitioned process capability analysis | Edward W. Conrad, John S. Smyth, Daniel Sullivan | 2005-07-26 |
| 6856378 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Charles A. Whiting | 2005-02-15 |