Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967709 | Overlay and CD process window structure | Daniel J. Mellinger, Timothy C. Milmore | 2005-11-22 |
| 6856378 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Charles J. Parrish, Craig E. Schneider, Charles A. Whiting | 2005-02-15 |