Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968288 | Method for detection of photolithographic defocus | Dennis L. Macaluso, Richard A. Phelps | 2005-11-22 |
| 6856378 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Craig E. Schneider | 2005-02-15 |