Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958525 | Low dielectric constant film material, film and semiconductor device using such material | Yoshihiro Nakata, Katsumi Suzuki, Ei Yano, Tamotsu Owada, Iwao Sugiura | 2005-10-25 |
| 6949830 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Hirofumi Watatani, Kengo Inoue, Atsuo Shimizu | 2005-09-27 |
| 6943431 | Semiconductor device using low-k material as interlayer insulating film and including a surface modifying layer | Tamotsu Owada, Hiroko Inoue, Ken Sugimoto | 2005-09-13 |