Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958525 | Low dielectric constant film material, film and semiconductor device using such material | Yoshihiro Nakata, Shun-ichi Fukuyama, Katsumi Suzuki, Tamotsu Owada, Iwao Sugiura | 2005-10-25 |
| 6937038 | Contactor having conductive particles in a hole as a contact electrode | Shigeyuki Maruyama, Susumu Kida, Naoyuki Watanabe, Takafumi Hashitani, Ichiro Midorikawa | 2005-08-30 |
| 6887644 | Polymer compound for a chemical amplification resist and a fabrication process of a semiconductor device using such a chemical amplification resist | Koji Nozaki | 2005-05-03 |
| 6844135 | Chemically amplified resist material and patterning method using same | Junichi Kon, Koji Nozaki | 2005-01-18 |