Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949830 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Shun-ichi Fukuyama, Kengo Inoue, Atsuo Shimizu | 2005-09-27 |
| 6852587 | Method for fabricating a semiconductor device | — | 2005-02-08 |