Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949830 | Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device | Tamotsu Owada, Shun-ichi Fukuyama, Hirofumi Watatani, Atsuo Shimizu | 2005-09-27 |