Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943431 | Semiconductor device using low-k material as interlayer insulating film and including a surface modifying layer | Shun-ichi Fukuyama, Tamotsu Owada, Ken Sugimoto | 2005-09-13 |