Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930837 | Optical projection lens system | David Shafer | 2005-08-16 |
| 6927901 | Reflective projection lens for EUV-photolithography | Hans-Juergen Mann, Russell Hudyma | 2005-08-09 |
| 6906866 | Compact 1½-waist system for sub 100 nm ArF lithography | Russell Hudyma, Hans-Juergen Rostalski | 2005-06-14 |
| 6903802 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, David Shafer, Helmut Beierl, Wolfgang Singer | 2005-06-07 |
| 6894834 | Objective with pupil obscuration | Hans-Jurgen Mann | 2005-05-17 |
| 6891596 | Refractive projection objective for immersion lithography | Hans-Juergen Rostalski | 2005-05-10 |
| 6859328 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Hein Schuster, Udo Dinger, Wolfgang Singer +2 more | 2005-02-22 |