Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927901 | Reflective projection lens for EUV-photolithography | Hans-Juergen Mann, Wilhelm Ulrich | 2005-08-09 |
| 6906866 | Compact 1½-waist system for sub 100 nm ArF lithography | Wilhelm Ulrich, Hans-Juergen Rostalski | 2005-06-14 |
| 6864861 | Image generator having a miniature display device | Kevin Schehrer, William J. Cassarly, Douglas J. McKnight, Jonathan R. Biles, Miller H. Schuck +1 more | 2005-03-08 |