Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906866 | Compact 1½-waist system for sub 100 nm ArF lithography | Russell Hudyma, Wilhelm Ulrich | 2005-06-14 |
| 6891596 | Refractive projection objective for immersion lithography | Wilhelm Ulrich | 2005-05-10 |