Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956694 | Broad spectrum ultraviolet inspection systems employing catadioptric imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2005-10-18 |
| 6930837 | Optical projection lens system | Wilhelm Ulrich | 2005-08-16 |
| 6912042 | 6-mirror projection objective with few lenses | — | 2005-06-28 |
| 6903802 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer | 2005-06-07 |
| 6873476 | Microlithographic reduction projection catadioptric objective | — | 2005-03-29 |
| 6842298 | Broad band DUV, VUV long-working distance catadioptric imaging system | Yung-Ho Alex Chuang | 2005-01-11 |