Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system | Vincent Ku, Ling Chen, Dien-Yeh Wu, Irena H. Wysok | 2005-10-18 |
| 6916398 | Gas delivery apparatus and method for atomic layer deposition | Ling Chen, Vincent Ku, Dien-Yeh Wu, Hua Chung, Norman Nakashima | 2005-07-12 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2005-06-14 |