Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964882 | Fabricating complex micro-electromechanical systems using a flip bonding technique | Chang-Han Yun, Maurice S. Karpman, John A. Yasaitis, Michael Judy, Colin Gormley | 2005-11-15 |
| 6940636 | Optical switching apparatus and method of assembling same | — | 2005-09-06 |
| 6936918 | MEMS device with conductive path through substrate | Kieran P. Harney, Thomas Kieran Nunan, Susan A. Alie, Bruce Wachtmann | 2005-08-30 |
| 6933163 | Fabricating integrated micro-electromechanical systems using an intermediate electrode layer | Chang-Han Yun, Maurice S. Karpman, John A. Yasaitis, Michael Judy, Colin Gormley | 2005-08-23 |
| 6931170 | Fiber-attached optical devices with in-plane micromachined mirrors | Chang-Han Yun, Shanti Bhattacharya, Yakov Reznichenko, John R. Martin, Jeffrey Ralph Swift +2 more | 2005-08-16 |
| 6893574 | MEMS capping method and apparatus | Peter Farrell, Jing Luo, David J. Collins, John R. Martin, William A. Webster | 2005-05-17 |