Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964882 | Fabricating complex micro-electromechanical systems using a flip bonding technique | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Michael Judy | 2005-11-15 |
| 6933163 | Fabricating integrated micro-electromechanical systems using an intermediate electrode layer | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Michael Judy | 2005-08-23 |