Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964882 | Fabricating complex micro-electromechanical systems using a flip bonding technique | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Colin Gormley | 2005-11-15 |
| 6964894 | Apparatus and method of forming a device layer | Bruce Wachtmann | 2005-11-15 |
| 6933163 | Fabricating integrated micro-electromechanical systems using an intermediate electrode layer | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Colin Gormley | 2005-08-23 |
| 6931170 | Fiber-attached optical devices with in-plane micromachined mirrors | Chang-Han Yun, Shanti Bhattacharya, Yakov Reznichenko, John R. Martin, Lawrence E. Felton +2 more | 2005-08-16 |
| 6892576 | Reducing offset in accelerometers | Howard R. Samuels, David C. Hollocher, Thor Juneau | 2005-05-17 |