Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946326 | Method and device for protecting micro electromechanical systems structures during dicing of a wafer | Timothy Spooner, David S. Courage, John R. Martin | 2005-09-20 |
| 6936918 | MEMS device with conductive path through substrate | Lawrence E. Felton, Thomas Kieran Nunan, Susan A. Alie, Bruce Wachtmann | 2005-08-30 |
| 6931170 | Fiber-attached optical devices with in-plane micromachined mirrors | Chang-Han Yun, Shanti Bhattacharya, Yakov Reznichenko, John R. Martin, Lawrence E. Felton +2 more | 2005-08-16 |