Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936918 | MEMS device with conductive path through substrate | Kieran P. Harney, Lawrence E. Felton, Susan A. Alie, Bruce Wachtmann | 2005-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936918 | MEMS device with conductive path through substrate | Kieran P. Harney, Lawrence E. Felton, Susan A. Alie, Bruce Wachtmann | 2005-08-30 |