Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893574 | MEMS capping method and apparatus | Lawrence E. Felton, Peter Farrell, Jing Luo, David J. Collins, John R. Martin | 2005-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893574 | MEMS capping method and apparatus | Lawrence E. Felton, Peter Farrell, Jing Luo, David J. Collins, John R. Martin | 2005-05-17 |