Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797630 | Partial via hard mask open on low-k dual damascene etch with dual hard mask (DHM) approach | Chen-Nan Yeh, Li-Te Lin, Li-Chih Chao | 2004-09-28 |
| 6780782 | Bi-level resist structure and fabrication method for contact holes on semiconductor substrates | Ming-Huan Tsai, Hun-Jan Tao, Ju-Wang Hsu | 2004-08-24 |
| 6720256 | Method of dual damascene patterning | Li-Te Lin, Li-Chih Chao | 2004-04-13 |