Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787455 | Bi-layer photoresist method for forming high resolution semiconductor features | Ming-Huan Tsai, Hun-Jan Tao, Cheng-Ku Chen | 2004-09-07 |
| 6780782 | Bi-level resist structure and fabrication method for contact holes on semiconductor substrates | Ming-Huan Tsai, Hun-Jan Tao, Tsang-Jiuh Wu | 2004-08-24 |
| 6706640 | Metal silicide etch resistant plasma etch method | Ming-Huan Tsai, Peng-Fu Hsu, Hun-Jan Tao | 2004-03-16 |