Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828205 | Method using wet etching to trim a critical dimension | Ming-Jie Huang, Huan-Just Lin, Hun-Jan Tao | 2004-12-07 |
| 6787455 | Bi-layer photoresist method for forming high resolution semiconductor features | Hun-Jan Tao, Ju-Wang Hsu, Cheng-Ku Chen | 2004-09-07 |
| 6780782 | Bi-level resist structure and fabrication method for contact holes on semiconductor substrates | Hun-Jan Tao, Tsang-Jiuh Wu, Ju-Wang Hsu | 2004-08-24 |
| 6764911 | Multiple etch method for fabricating spacer layers | Jw-Wang Hsu, Mei-Ru Kuo, Baw-Ching Peng, Hun-Jan Tao | 2004-07-20 |
| 6720132 | Bi-layer photoresist dry development and reactive ion etch method | Hun-Jan Tao | 2004-04-13 |
| 6706640 | Metal silicide etch resistant plasma etch method | Ju-Wang Hsu, Peng-Fu Hsu, Hun-Jan Tao | 2004-03-16 |