Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828205 | Method using wet etching to trim a critical dimension | Ming-Huan Tsai, Ming-Jie Huang, Hun-Jan Tao | 2004-12-07 |
| 6828248 | Method of pull back for forming shallow trench isolation | Hun-Jan Tao | 2004-12-07 |
| 6794302 | Dynamic feed forward temperature control to achieve CD etching uniformity | Li-Shiun Chen, Ming-Ching Chang, Li-Te Lin, Yung-Hog Chiu, Hun-Jan Tao | 2004-09-21 |
| 6706591 | Method of forming a stacked capacitor structure with increased surface area for a DRAM device | Bor-Wen Chan, Hun-Jan Tao | 2004-03-16 |