Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794302 | Dynamic feed forward temperature control to achieve CD etching uniformity | Li-Shiun Chen, Huan-Just Lin, Li-Te Lin, Yung-Hog Chiu, Hun-Jan Tao | 2004-09-21 |
| 6794313 | Oxidation process to improve polysilicon sidewall roughness | — | 2004-09-21 |
| 6686129 | Partial photoresist etching | Hun-Jan Tao | 2004-02-03 |