Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794302 | Dynamic feed forward temperature control to achieve CD etching uniformity | Ming-Ching Chang, Huan-Just Lin, Li-Te Lin, Yung-Hog Chiu, Hun-Jan Tao | 2004-09-21 |
LC
Li-Shiun Chen
Overall (2004): #168,557 of 270,089Top 65%
1
Patents 2004