Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828237 | Sidewall polymer deposition method for forming a patterned microelectronic layer | Fang Chen, Hsien-Kuang Chiu, Yuan-Hung Chiu, Han Tao | 2004-12-07 |
| 6812044 | Advanced control for plasma process | Hsien-Kuang Chiu, Baw-Ching Perng, Yuan-Hung Chiu, Hun-Jan Tao | 2004-11-02 |
| 6764903 | Dual hard mask layer patterning method | Yuan-Hung Chiu, Hun-Jan Tao | 2004-07-20 |
| 6713398 | Method of planarizing polysillicon plug | — | 2004-03-30 |
| 6706591 | Method of forming a stacked capacitor structure with increased surface area for a DRAM device | Huan-Just Lin, Hun-Jan Tao | 2004-03-16 |