Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828237 | Sidewall polymer deposition method for forming a patterned microelectronic layer | Bor-Wen Chan, Fang Chen, Yuan-Hung Chiu, Han Tao | 2004-12-07 |
| 6812044 | Advanced control for plasma process | Bor-Wen Chan, Baw-Ching Perng, Yuan-Hung Chiu, Hun-Jan Tao | 2004-11-02 |
| 6777299 | Method for removal of a spacer | Chih-Hao Wang | 2004-08-17 |
| 6777340 | Method of etching a silicon containing layer using multilayer masks | Fang Chen, Hun-Jan Tao, Yuan-Hung Chiu, Jeng-Horng Chen | 2004-08-17 |
| 6703250 | Method of controlling plasma etch process | — | 2004-03-09 |