Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797630 | Partial via hard mask open on low-k dual damascene etch with dual hard mask (DHM) approach | Tsang-Jiuh Wu, Li-Te Lin, Li-Chih Chao | 2004-09-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797630 | Partial via hard mask open on low-k dual damascene etch with dual hard mask (DHM) approach | Tsang-Jiuh Wu, Li-Te Lin, Li-Chih Chao | 2004-09-28 |