Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835525 | Polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Kenji Funatsu | 2004-12-28 |
| 6830866 | Resist composition and patterning process | Tomohiro Kobayashi, Satoshi Watanabe, Takeshi Kinsho, Shigehiro Nagura, Toshinobu Ishihara | 2004-12-14 |
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Takeshi Kinsho, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi | 2004-09-21 |
| 6784268 | Ether, polymer, resist composition and patterning process | Seiichiro Tachibana, Mutsuo Nakashima | 2004-08-31 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2004-08-24 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa +1 more | 2004-06-01 |
| 6703183 | Polymer, resist composition and patterning process | Takeshi Kinsho, Koji Hasegawa, Satoshi Watanabe, Shigehiro Nagura | 2004-03-09 |
| 6677101 | Polymers, resist materials, and pattern formation method | Koji Hasegawa, Mutsuo Nakashima | 2004-01-13 |
| 6673515 | Polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |
| 6673518 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho | 2004-01-06 |
| 6673517 | Polymer, resist composition and patterning process | Takeshi Kinsho | 2004-01-06 |