Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835525 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Kenji Funatsu | 2004-12-28 |
| 6784268 | Ether, polymer, resist composition and patterning process | Seiichiro Tachibana, Tsunehiro Nishi | 2004-08-31 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Takeru Watanabe, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Seiichiro Tachibana, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6730453 | High molecular weight silicone compounds, resist compositions, and patterning method | Ichiro Kaneko, Toshinobu Ishihara, Junji Tsuchiya, Jun Hatakeyama, Shigehiro Nagura | 2004-05-04 |
| 6677101 | Polymers, resist materials, and pattern formation method | Tsunehiro Nishi, Koji Hasegawa | 2004-01-13 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |