Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835525 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Kenji Funatsu | 2004-12-28 |
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi | 2004-09-21 |
| 6784268 | Ether, polymer, resist composition and patterning process | Mutsuo Nakashima, Tsunehiro Nishi | 2004-08-31 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |