Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830866 | Resist composition and patterning process | Tsunehiro Nishi, Satoshi Watanabe, Takeshi Kinsho, Shigehiro Nagura, Toshinobu Ishihara | 2004-12-14 |
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Tsunehiro Nishi, Takeshi Kinsho, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa | 2004-09-21 |
| 6749988 | Amine compounds, resist compositions and patterning process | Jun Hatakeyama, Takeru Watanabe, Takeshi Nagata | 2004-06-15 |
| 6743564 | Amine compounds, resist compositions and patterning process | Jun Hatakeyama, Takeru Watanabe | 2004-06-01 |