Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830866 | Resist composition and patterning process | Tomohiro Kobayashi, Tsunehiro Nishi, Satoshi Watanabe, Takeshi Kinsho, Toshinobu Ishihara | 2004-12-14 |
| 6818148 | Resist composition and patterning method | Satoshi Watanabe, Toyohisa Sakurada, Yoshitaka Yanagi, Toshinobu Ishihara | 2004-11-16 |
| 6730453 | High molecular weight silicone compounds, resist compositions, and patterning method | Mutsuo Nakashima, Ichiro Kaneko, Toshinobu Ishihara, Junji Tsuchiya, Jun Hatakeyama | 2004-05-04 |
| 6703183 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeshi Kinsho, Koji Hasegawa, Satoshi Watanabe | 2004-03-09 |