Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830866 | Resist composition and patterning process | Tomohiro Kobayashi, Tsunehiro Nishi, Satoshi Watanabe, Shigehiro Nagura, Toshinobu Ishihara | 2004-12-14 |
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Tsunehiro Nishi, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi | 2004-09-21 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6774258 | Tertiary alcohol compounds having alicyclic structure | Koji Hasegawa, Takeru Watanabe | 2004-08-10 |
| 6746818 | (Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process | Koji Hasegawa, Takeru Watanabe | 2004-06-08 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6703183 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Satoshi Watanabe, Shigehiro Nagura | 2004-03-09 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |
| 6673518 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa | 2004-01-06 |
| 6673517 | Polymer, resist composition and patterning process | Tsunehiro Nishi | 2004-01-06 |