Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794111 | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation | Tsunehiro Nishi, Takeshi Kinsho, Seiichiro Tachibana, Koji Hasegawa, Tomohiro Kobayashi | 2004-09-21 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6774258 | Tertiary alcohol compounds having alicyclic structure | Koji Hasegawa, Takeshi Kinsho | 2004-08-10 |
| 6749988 | Amine compounds, resist compositions and patterning process | Jun Hatakeyama, Tomohiro Kobayashi, Takeshi Nagata | 2004-06-15 |
| 6746818 | (Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process | Takeshi Kinsho, Koji Hasegawa | 2004-06-08 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6743564 | Amine compounds, resist compositions and patterning process | Jun Hatakeyama, Tomohiro Kobayashi | 2004-06-01 |
| 6673511 | Resist composition | Jun Hatakeyama, Youichi Ohsawa | 2004-01-06 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa +1 more | 2004-01-06 |