Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713612 | Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process | Katsuhiro Kobayashi, Koji Hasegawa, Takao Yoshihara, Kazunori Maeda, Toshihiko Fujii | 2004-03-30 |
| 6692893 | Onium salts, photoacid generators, resist compositions, and patterning process | Jun Watanabe, Takeshi Nagata, Jun Hatakeyama | 2004-02-17 |
| 6689530 | Sulfonyldiazomethanes, photoacid generations, resist compositions, and patterning process | Katsuhiro Kobayashi, Kazunori Maeda | 2004-02-10 |
| 6682869 | Chemical amplification, positive resist compositions | Jun Watanabe, Takanobu Takeda, Akihiro Seki | 2004-01-27 |
| 6673511 | Resist composition | Jun Hatakeyama, Takeru Watanabe | 2004-01-06 |