Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800551 | Chemical amplification type photoresist composition, method for producing a semiconductor device using the composition, and semiconductor substrate | Seiji Nagahara, Toyohisa Sakurada | 2004-10-05 |
| 6713612 | Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process | Katsuhiro Kobayashi, Youichi Ohsawa, Koji Hasegawa, Kazunori Maeda, Toshihiko Fujii | 2004-03-30 |