Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713612 | Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process | Katsuhiro Kobayashi, Youichi Ohsawa, Koji Hasegawa, Takao Yoshihara, Toshihiko Fujii | 2004-03-30 |
| 6689530 | Sulfonyldiazomethanes, photoacid generations, resist compositions, and patterning process | Youichi Ohsawa, Katsuhiro Kobayashi | 2004-02-10 |