Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835804 | Preparation of polymer, and resist composition using the polymer | Osamu Watanabe | 2004-12-28 |
| 6746817 | Resist composition and patterning process | Jun Hatakeyama, Osamu Watanabe, Hiroshi Kubota | 2004-06-08 |
| 6737214 | Chemical amplification resist compositions | Osamu Watanabe, Kazuhiro Hirahara, Katsuya Takemura, Wataru Kusaki, Akihiro Seki | 2004-05-18 |
| 6682869 | Chemical amplification, positive resist compositions | Youichi Ohsawa, Jun Watanabe, Akihiro Seki | 2004-01-27 |