Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805801 | Method and apparatus to remove additives and contaminants from a supercritical processing solution | Raashina Humayun | 2004-10-19 |
| 6800142 | Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment | Adrianne K. Tipton, Krishnan Shrinivasan, Souvik Banerjee, Raashina Humayun | 2004-10-05 |
| 6764552 | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials | Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess, Satyanarayana Myneni, Galit Levitin | 2004-07-20 |
| 6715498 | Method and apparatus for radiation enhanced supercritical fluid processing | Raashina Humayun, Vishal Gauri, Adrianne K. Tipton | 2004-04-06 |