Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805801 | Method and apparatus to remove additives and contaminants from a supercritical processing solution | Patrick Joyce | 2004-10-19 |
| 6800142 | Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment | Adrianne K. Tipton, Krishnan Shrinivasan, Souvik Banerjee, Patrick Joyce | 2004-10-05 |
| 6715498 | Method and apparatus for radiation enhanced supercritical fluid processing | Patrick Joyce, Vishal Gauri, Adrianne K. Tipton | 2004-04-06 |