Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764552 | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials | Patrick Joyce, Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess, Galit Levitin | 2004-07-20 |