Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6786977 | Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits | Matthew Spuller | 2004-09-07 |
| 6764552 | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials | Patrick Joyce, Adrianne K. Tipton, Krishnan Shrinivasan, Satyanarayana Myneni, Galit Levitin | 2004-07-20 |