Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830622 | Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof | Robert O'Donnell | 2004-12-14 |
| 6821378 | Pump baffle and screen to improve etch uniformity | Neil Benjamin, Song Huang | 2004-11-23 |
| 6790242 | Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, Christopher C. Chang | 2004-09-14 |
| 6776851 | In-situ cleaning of a polymer coated plasma processing chamber | Harmeet Singh, Vahid Vahedi, Saurabh Ullal | 2004-08-17 |
| 6773751 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, Christopher C. Chang | 2004-08-10 |
| 6770214 | Method of reducing aluminum fluoride deposits in plasma etch reactor | Duane Outka, Yousun Kim, Anthony Chen | 2004-08-03 |