Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776851 | In-situ cleaning of a polymer coated plasma processing chamber | John Daugherty, Vahid Vahedi, Saurabh Ullal | 2004-08-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776851 | In-situ cleaning of a polymer coated plasma processing chamber | John Daugherty, Vahid Vahedi, Saurabh Ullal | 2004-08-17 |