Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804572 | Enhanced process and profile simulator algorithms | David Cooperberg | 2004-10-12 |
| 6776851 | In-situ cleaning of a polymer coated plasma processing chamber | Harmeet Singh, John Daugherty, Saurabh Ullal | 2004-08-17 |