Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821378 | Pump baffle and screen to improve etch uniformity | John Daugherty, Song Huang | 2004-11-23 |
| 6781393 | Methods relating to wafer integrated plasma probe assembly arrays | — | 2004-08-24 |